Source: https://tendernation.io/opportunities/01a14095-2fc3-73f2-be1d-873f4cd7b2ad/germany-miscellaneous-general-and-special-purpose-machinery-clustertool-for

closed DE

# Miscellaneous general and special-purpose machinery – Clustertool for Ion Beam Etching of 300mm wafers

[Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.](https://tendernation.io/buyers/fraunhofer-gesellschaft-zur-forderung-der-angewandten-forschung-e-v)

Estimated value

Not stated

Published

19 Feb 2026

Deadline

Closed

20 Mar 2026

## About this tender

The tender item is an ion beam etching process tool to be used for 300mm wafer fabrication at the FRAUNHOFER IPMS. The systems will be used for the processing of CMOS wafers in a cleanroom class 1000 (approximately class 6 EN ISO 14644-1) production environment. Therefore, it is necessary to fulfill require-ments regarding metal contamination and particle generation compatible with industry standards.

## CPV classification

Miscellaneous general and special-purpose machinery

Source

Tenders Electronic Daily (EU) · Notice 117594-2026

[View official notice](https://ted.europa.eu/en/notice/117594-2026)

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