Source: https://tendernation.io/opportunities/01a14085-d15b-714c-bb44-8f86ee3ac8f5/finland-laboratory-optical-and-precision-equipments-excl-glasses-wafer-m

closed FI open procedure Suitable for SMEs

# Laboratory, optical and precision equipments (excl. glasses) – Wafer metrology

[VTT Technical Research Centre of Finland Ltd](https://tendernation.io/buyers/vtt-technical-research-centre-of-finland-ltd)

Estimated value

Not stated

Published

28 Apr 2026

Deadline

Closed

29 May 2026

## Who can bid

- Buyer says suitable for SMEs

    The buyer ticked “suitable for SMEs” on the notice. Anyone can still bid.
- Open procedure

    Anyone can submit a full tender; there is no shortlisting stage.

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## About this tender

The object of the tender is semi-automatic wafer metrology tool (later also “tool”) for measurement of total thickness, TTV (total thickness variation), warp, bow, metallization bumps, trench or via depth and geometric factors in substrates typical in semiconductor industry such as but not limited to silicon wafers, chips, stacked wafers, stacked chips, samples containing mixed oxides, or/and thin materials deposited. The tool must be compatible with installation in an ISO 4 classified cleanroom. The object of the tender process is described in more detail in the invitation to tender documents.

## CPV classification

Laboratory, optical and precision equipments (excl. glasses) Measuring instruments

Source

Tenders Electronic Daily (EU) · Notice 290369-2026

[View official notice](https://ted.europa.eu/en/notice/290369-2026)

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