Source: https://tendernation.io/opportunities/01a1407c-eb6c-7276-a876-b1ba2067235a/germany-miscellaneous-special-purpose-machinery-upgrade-of-a-200-mm-wxz-tung

closed DE Suitable for SMEs

# Miscellaneous special-purpose machinery – Upgrade of a 200 mm WxZ Tungsten CVD Chamber to WxZ Sprint Configuration

[IHP GmbH - Leibniz-Institut für innovative Mikroelektronik](https://tendernation.io/buyers/ihp-gmbh-leibniz-institut-fur-innovative-mikroelektronik)

Estimated value

Not stated

Published

5 Jun 2026

Deadline

Closed

7 Jul 2026

## Who can bid

- Buyer says suitable for SMEs

    The buyer ticked “suitable for SMEs” on the notice. Anyone can still bid.

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## About this tender

Gegenstand der Beschaffung ist das Upgrade eines bestehenden 200 mm Wolfram Chemical Vapor Deposition (CVD)-Systems des Herstellers Applied Materials Inc. (AMAT) auf eine WxZ Sprint Konfiguration. Hierzu sind insbesondere Anpassungen am Gasverteilungssystem zur Realisierung eines gepulsten Wolfram-Abscheidungsprozesses sowie die Integration zusätzlicher Hardware zur Ermöglichung von Depositionsdrücken bis 300 Torr erforderlich. Die Leistungen umfassen die Planung, Lieferung, Integration, Inbetriebnahme und Qualifizierung der erforderlichen Hard- und Softwareanpassungen am bestehenden Anlagensystem.

## CPV classification

Miscellaneous special-purpose machinery Microelectronic machinery and apparatus

Source

Tenders Electronic Daily (EU) · Notice 386607-2026

[View official notice](https://ted.europa.eu/en/notice/386607-2026)

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[Buyer profile IHP GmbH - Leibniz-Institut für innovative Mikroelektronik: past awards and live tenders](https://tendernation.io/buyers/ihp-gmbh-leibniz-institut-fur-innovative-mikroelektronik) [Sector More Industrial machinery tenders](https://tendernation.io/sectors/industrial-machinery)

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