Source: https://tendernation.io/opportunities/01a14068-19af-71e3-823e-43a163a4c6a8/denmark-industrial-machinery-delivery-and-installation-of-a-high-ion-density closed DK open procedure Suitable for SMEs # Industrial machinery – Delivery and installation of a High ion density etcher for lithium niobate on insulator - LiNb03 (LN) [Danmarks Tekniske Universitet - DTU](https://tendernation.io/buyers/danmarks-tekniske-universitet-dtu) Estimated value Not stated Published 11 Sept 2026 Deadline Closed 15 Oct 2026 ## Who can bid - Buyer says suitable for SMEs The buyer ticked “suitable for SMEs” on the notice. Anyone can still bid. - Open procedure Anyone can submit a full tender; there is no shortlisting stage. [More contracts for small businesses and VCSEs](https://tendernation.io/opportunities/for-small-businesses) ## About this tender DTU Nanolab wishes to acquire a high ion density source reactive ion etcher for etching lithium niobate on insulator 150 mm wafer processing. Delivery is expected no later than Q4 2027. We are looking for a highly versatile instrument providing stable etch recipes, capable of etching at both nanometer scale and micrometer scale with precise control of etching depth, typically a few hundreds of nm. The instrument must have state-of-the-art performance in terms of profile control, uniformity, selectivity, and in particu-lar etching sidewall smoothness to achieve low waveguide loss. The Instrument will be installed in the DTU Nanolab cleanroom - a university facility providing a comprehensive suite of micro- and nanofabrication tools. It serves a diverse community of over 200 active users, ranging from novice students to experienced researchers, as well a high percentage of commercial clients. At DTU Nanolab there are several research groups and companies working on developing and running small scale production of optical devises on the tools. Therefor the capability of etching smooth optical waveguide, gratings and other low-roughness optical devises are of high importance to us. ## CPV classification Industrial machinery Industrial lasers Industrial process control equipment Source Tenders Electronic Daily (EU) · Notice 628101-2026 [View official notice](https://ted.europa.eu/en/notice/628101-2026) Never miss a tender like this again Get AI summaries, deadline alerts and a bid pipeline for tenders matched to your business. Free to start. [Track tenders free](https://tendernation.io/register) [Buyer profile Danmarks Tekniske Universitet - DTU: past awards and live tenders](https://tendernation.io/buyers/danmarks-tekniske-universitet-dtu) [Sector More Industrial machinery tenders](https://tendernation.io/sectors/industrial-machinery) ## More tenders like this [Industrial machinery – Delivery and installation of a ICP Reactive ion etcher for silicon dielctrics · Danmarks Tekniske Universitet - DTU · 35 days left · 23 Nov 2026](https://tendernation.io/opportunities/01a13e2d-0adc-733c-ba38-eb08ffb085ec/denmark-industrial-machinery-delivery-and-installation-of-a-icp-reactive-ion) [Industrial machinery – Deep Reaction Ion Etcher (DRIE) · Uppsala universitet · 21 days left · 9 Nov 2026](https://tendernation.io/opportunities/01a14062-2084-7027-a4df-2baf6404269c/sweden-industrial-machinery-deep-reaction-ion-etcher-drie) [Industrial machinery – Deep Reaction Ion Etcher (DRIE) · Uppsala universitet · 21 days left · 9 Nov 2026](https://tendernation.io/opportunities/01a13e2c-b65c-72ea-9aad-97556de24fe3/sweden-industrial-machinery-deep-reaction-ion-etcher-drie) [Laboratory, optical and precision equipments (excl. glasses) – Electron Beam Lithography (EBL) Tool · Lunds universitet · 17 days left · 5 Nov 2026](https://tendernation.io/opportunities/01a14062-75fb-72b2-be5f-46eee426c702/sweden-laboratory-optical-and-precision-equipments-excl-glasses-electron) [Laboratory, optical and precision equipments (excl. glasses) – Dielectric Etcher · Technische Universiteit Eindhoven · 37 days left · 25 Nov 2026](https://tendernation.io/opportunities/01a14060-29b7-71dc-995f-81379c2256d4/netherlands-laboratory-optical-and-precision-equipments-excl-glasses-die) [Machines and apparatus for testing and measuring – One Photonic Wafer Probe Station and one Photonic Assembly Station · Danmarks Tekniske Universitet - DTU · 14 days left · 2 Nov 2026](https://tendernation.io/opportunities/01a14062-fc0d-7168-bfa6-80f0c3caaef3/denmark-machines-and-apparatus-for-testing-and-measuring-one-photonic-wafer)