Source: https://tendernation.io/opportunities/01a14062-75fb-72b2-be5f-46eee426c702/sweden-laboratory-optical-and-precision-equipments-excl-glasses-electron

Open for bids SE open procedure

# Laboratory, optical and precision equipments (excl. glasses) – Electron Beam Lithography (EBL) Tool

[Lunds universitet](https://tendernation.io/buyers/lunds-universitet)

Estimated value

SEK 26,000,000

Published

7 Oct 2026

Deadline

18 days left

5 Nov 2026

## Who can bid

- Open procedure

    Anyone can submit a full tender; there is no shortlisting stage.

## About this tender

Lund University, Department of Physics, Lund Nano Lab is acquiring an Electron Beam Lithography Tool. The instrument is intended for high resolution, repeatable patterning, equipped with a large writing field for high throughput patterning, and automated self-calibration routines to support long exposures with minimal errors due to beam drift. Finally, its flexible sample loading system must be configured for a wide range of samples from small pieces used for basic science, or wafers up to 8" in diameter for pilot production testing. With these properties, the Electron Beam Lithography Tool will become a central part of the Lund Nano Lab fabrication infrastructure and support a range of applications such as quantum devices, high-power electronics, metasurfaces and more. In addition to the instrument, the tender must include all associated costs such as warranty, packaging, insurance, on-site installation, commissioning, FAT, SAT, duty and transportation, training, documentation, support, development/software updates, charges under the Ordinance on Producer Responsibility for Packaging (2022:1274) etc.

## CPV classification

Laboratory, optical and precision equipments (excl. glasses)

Source

Tenders Electronic Daily (EU) · Notice 690718-2026

[View official notice](https://ted.europa.eu/en/notice/690718-2026)

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