Source: https://tendernation.io/opportunities/01a14062-2084-7027-a4df-2baf6404269c/sweden-industrial-machinery-deep-reaction-ion-etcher-drie Open for bids SE open procedure # Industrial machinery – Deep Reaction Ion Etcher (DRIE) [Uppsala universitet](https://tendernation.io/buyers/uppsala-universitet) Estimated value SEK 1 Published 8 Oct 2026 Deadline 21 days left 9 Nov 2026 ## Who can bid - Small contract value Valued under £135,018 including VAT, the lowest Procurement Act threshold for goods and services. - Open procedure Anyone can submit a full tender; there is no shortlisting stage. ## About this tender Myfab Uppsala aims at purchasing a Deep Reaction Ion Etcher (DRIE). The purpose of the tool is to transfer patterns defined by e.g., photo- and electron beam lithography covering the pattens size range from all substrate range down to a few nanometres. The system will be used by many operators in a university laboratory environment. It must be easy to use and be insensitive to frequent change of process between batches. The processes include broad range of etching capability: low to high etch rate, wafer dicing, high uniformity, high open area, high aspect ratio, and nanometre scale. The system is intended for etching of silicon as well as other materials compatible with silicon etching, with both photoresist resins and hard masks for patterning. ## CPV classification Industrial machinery Source Tenders Electronic Daily (EU) · Notice 693624-2026 [View official notice](https://ted.europa.eu/en/notice/693624-2026) Never miss a tender like this again Get AI summaries, deadline alerts and a bid pipeline for tenders matched to your business. Free to start. [Track tenders free](https://tendernation.io/register) [Buyer profile Uppsala universitet: past awards and live tenders](https://tendernation.io/buyers/uppsala-universitet) [Sector More Industrial machinery tenders](https://tendernation.io/sectors/industrial-machinery) ## More tenders like this [Industrial machinery – Deep Reaction Ion Etcher (DRIE) · Uppsala universitet · 21 days left · 9 Nov 2026](https://tendernation.io/opportunities/01a13e2c-b65c-72ea-9aad-97556de24fe3/sweden-industrial-machinery-deep-reaction-ion-etcher-drie) [Industrial machinery – Delivery and installation of a ICP Reactive ion etcher for silicon dielctrics · Danmarks Tekniske Universitet - DTU · 35 days left · 23 Nov 2026](https://tendernation.io/opportunities/01a13e2d-0adc-733c-ba38-eb08ffb085ec/denmark-industrial-machinery-delivery-and-installation-of-a-icp-reactive-ion) [Laboratory, optical and precision equipments (excl. glasses) – Electron Beam Lithography (EBL) Tool · Lunds universitet · 17 days left · 5 Nov 2026](https://tendernation.io/opportunities/01a14062-75fb-72b2-be5f-46eee426c702/sweden-laboratory-optical-and-precision-equipments-excl-glasses-electron) [Laboratory, optical and precision equipments (excl. glasses) – Un équipement plasma de gravure ionique réactive de métaux pour le Centre de MicroNanoTechnologie · EPFL-Scientific Equipment · 24 days left · 12 Nov 2026](https://tendernation.io/opportunities/01a14062-debe-73bb-bb34-48d864de1783/switzerland-laboratory-optical-and-precision-equipments-excl-glasses-un) [Laboratory, optical and precision equipments (excl. glasses) – Un système de pulvérisation cathodique dédié à la déposition de couches minces supraconductrices de haute qualité · EPFL-Scientific Equipment · 16 days left · 4 Nov 2026](https://tendernation.io/opportunities/01a14064-dbb3-73d0-bb3f-d77ed0929ccc/switzerland-laboratory-optical-and-precision-equipments-excl-glasses-un) [Scanning electron microscopes – The procurement of the Supply, Installation and Commissioning of a Focused Ion Beam Scanning Electron Microscope (FIB-SEM) with Gallium Ion Source · Danmarks Tekniske Universitet - DTU · 28 days left · 16 Nov 2026](https://tendernation.io/opportunities/01a1405e-bd59-72e4-a7d1-bc90e2df120a/denmark-scanning-electron-microscopes-the-procurement-of-the-supply-install)