Source: https://tendernation.io/opportunities/01a1405f-1906-702c-9572-cf2d1688b4ec/finland-laboratory-optical-and-precision-equipments-excl-glasses-notice

awarded FI open procedure

# Laboratory, optical and precision equipments (excl. glasses) – Notice of discontinuation: Edge-Handling Sputtering Cluster Tool

[VTT Technical Research Centre of Finland Ltd](https://tendernation.io/buyers/vtt-technical-research-centre-of-finland-ltd)

Estimated value

Not stated

Published

14 Oct 2026

Deadline

Rolling deadline

## Who can bid

- Open procedure

    Anyone can submit a full tender; there is no shortlisting stage.

## About this tender

The object of the tender process is an edge-handling sputtering cluster tool (later also “Equipment”). The Equipment is a sputtering cluster tool for 200-mm wafers with wafer edge-handling capability for the VTT Micronova cleanroom semiconductor front end. The procurement includes a deposition chamber with four magnetron sputtering sources. During transport and processing, the wafers are mechanically touched only at the wafer edge, and they can be flipped in vacuum between the processes. The object of the tender process and the technical requirements are described in more detail in the invitation to tender documents.

## CPV classification

Laboratory, optical and precision equipments (excl. glasses)

Source

Tenders Electronic Daily (EU) · Notice 707454-2026

[View official notice](https://ted.europa.eu/en/notice/707454-2026)

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