Source: https://tendernation.io/opportunities/01a13bed-93b8-730a-9682-82a3f8ca94db/it16212-stfc-drie-refurbishment-site-day

pending GB open procedure

# IT16212 STFC DRIE Refurbishment Site Day

[UK Shared Business Services Limited](https://tendernation.io/buyers/uk-shared-business-services-limited)

Estimated value

Not stated

Published

2 Dec 2016

Deadline

Rolling deadline

## Who can bid

- Open procedure

    Anyone can submit a full tender; there is no shortlisting stage.

## About this tender

STFC, working closely with UK SBS are to host a Site Day to be held on Thursday 15th December 2016 at;

### I-TAC MNT

Innovations-Technology Access Centre (I-TAC)

### Business and Innovations Directorate

### Science and Technology Facilities Council

Rutherford AppletonLaboratory, Harwell Campus, Didcot, OX11 0QX.

Further details of this event can be obtained by expressing an interest to  clearly stating the reference number IT16212. In addition, further information will be released publicly in due course.

The Requirement will be tendered following the Site Day. The anticipated timescales for this are to launch on the 16th Dec 2016 with receipt of tenders on the 12th January 2017. This may be subject to change.

The Requirement can be found in the attached specification; overview below.

Innovations Technology Access Centre - Micro & Nano Technology group (ITAC-MNT) operates within the Business Innovation Directorate of STFC based at Rutherford Appleton Laboratories.

Our Cleanroom facility is unique in offering an "Open-Access" approach for Tenants, Off-site users and other STFC departments so that Customers can be trained and then have access to run & develop their own products on these tools. This gives SME companies, University students and other Industry Users open-access to semi-conductor machinery only otherwise situated in dedicated Large-Corporation Companies or Research Labs.

### Aims

Two DRIE Multiplex ICP systems form an essential part of ITAC-MNT's toolset offered to our Tenants and Cleanroom Users. They use incompatible gases and processes to etch very different materials. These two machines cannot be replaced by one tool.

One system (STS1) is setup using Fluorine chemistry for deep silicon etching for Microelectromechanical systems (MEMS) type devices:-

â&#128;¢ Silicon micro-machining

â&#128;¢ MEMS - Actuators, micro-motors

â&#128;¢ Bio-MEMS - micro-fluidic channels for use in lab-on-a-chip devices

The second system (STS2) is setup using Chlorine chemistry for etching of exotic materials such as Sapphire, GaAs and other compound III-V semiconductor materials used in high performance electronics and optoelectronics.

The two DRIE systems (STS1 and STS2) require upgrading because they run obsolete software and use obsolete computers that have become too difficult to repair and maintain.

If the machines no longer run then either a new system needs to be purchased or refurbishment of the system needs to be undertaken; otherwise we will lose part of our capability that we can offer. This will ultimately have an effect on both our income and the level of services we can offer to Customers.

### Objectives

â&#128;¢ We require two systems to be refurbished.

â&#128;¢ De-commissioning with minimal impact on Users of our Cleanroom.

â&#128;¢ A new software system + PCs to control it are needed.

Additional information: STFC, working closely with UK SBS are to host a Site Day to be held on the Thursday 15th December 2016 at

### I-TAC MNT

Innovations-Technology Access Centre (I-TAC)

### Business and Innovations Directorate

### Science and Technology Facilities Council

Rutherford AppletonLaboratory, Harwell Campus, Didcot, OX11 0QX.

Further details of this event can be obtained by expressing an interest to  clearly stating the reference number IT16212. In addition, further information will be released publicly in due course.

### UK Shared Business Services eSourcing

As part of the strategic alliance between UK Shared Business Services Ltd (UK SBS) and Crown Commercial Service (CCS), UK SBS can use the CCS eSourcing Suite for future procurements.

If you have not yet registered on the eSourcing Suite, this can be done online at [gpsesourcing.cabinetoffice.gov.uk](https://gpsesourcing.cabinetoffice.gov.uk) by following the link 'Register for CCS eSourcing'. Please note that, to register, you must have a valid DUNS number (as provided by Dun and Bradstreet) for the organisation which you are registering, who will be entering into a contract if invited to do so.

Once you have registered on the eSourcing Suite, a registered user can express an interest for a specific procurement. This is done by emailing .

Your email must clearly state: the name and reference for the procurement you wish to register for; the name of the registered Bidder; and the name and contact details for the registered individual sending the email.

Crown Commercial Service will process the email and then enable the Bidder to access the procurement online via the e-Sourcing Suite. The registered user will receive a notification email to alert them once this has been done.

The Sourcing documents can then be accessed on the eSourcing Suite at: [gpsesourcing.cabinetoffice.gov.uk](https://gpsesourcing.cabinetoffice.gov.uk) using the instructions detailed in the Specification documents within Contracts Finder.

As a user of the e-Sourcing Suite you will have access to Emptoris email messaging service which facilitates all messages sent to you and from you in relation to any specific RFX event. Please note it is your responsibility to access these emails on a regular basis to ensure you have sight of all relevant information.

For technical assistance on use of the e-Sourcing Suite please contact Crown Commercial Service Helpdesk : Telephone: 0345 010 3503

Training documents to support Bidders utilise Emptoris CCS eSourcing are available in the Contracts Finder Tender documents section.

Read full description

## CPV classification

Computer equipment and supplies

Source

Contracts Finder (UK)

[View official notice](https://www.contractsfinder.service.gov.uk/notice/0ac45da8-26de-498b-a5f8-412f1493333f)

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