Source: https://tendernation.io/opportunities/01a13bd7-3dc2-7122-a03f-6d862d31a578/ebeam-lithographer awarded GB negotiated without publication procedure # EBeam Lithographer [University Of Edinburgh](https://tendernation.io/buyers/university-of-edinburgh) Estimated value Not stated Published 2 Mar 2026 Deadline Rolling deadline ## About this tender The University has a requirement for an Electron Beam lithography system which has an acceleration voltage of at least 200 kV. It must be capable of the following: - Ultra-fine line lithography: 3 nm linewidth, using commercially available resists. This can be obtained by its single-nm digit beam diameter. - Ultra-high position accuracy: This can be obtained by a laser interferometer with Å (sub-1 nm) reading resolution, enabling a stitching accuracy of ±8 nm and overlay accuracy of ±8 nm. - Uniform fine pattern writing over entire field: Uniform nm-scale lines can be drawn from edge to edge across a large field (≥2000μm) without the need for stitching. This guarantees better accuracy, eliminates the need for stage movement, and enhances writing speed and throughput. - High throughput lithography: This will be enabled by a 125 MHz (or higher) high-speed deflection system coupled with a new electron beam column design. - Wafer scale (& multi wafer) processing: Single cassette auto-loader supporting 8-inch wafers with a multi-cassette automatic sample loading system. Fast loading and pumping time. - Flexibility in sample holders: Offer the ability to simultaneously handle a variety of wafer sizes by incorporating distinct holders for processing full wafers (2-8 inches) and/or small. - Software: SEM Imaging Software, Alignment Software and CAD designing Software, which allows using and/or converting into industry standard GDSII and DXF file formats. It is believed the JEOL JBX-8100FS G3 Electron Beam Lithography System is the sole machine which complies with these requirements. Therefore, we deem competition is absent for technical reasons. Read full description ## CPV classification Laboratory, optical and precision equipments (excl. glasses) Source Find a Tender (UK) · Notice ocds-h6vhtk-065fc1-2026-03-02T14:18:04Z [View official notice](https://www.find-tender.service.gov.uk/Notice/ocds-h6vhtk-065fc1-2026-03-02T14:18:04Z) Never miss a tender like this again Get AI summaries, deadline alerts and a bid pipeline for tenders matched to your business. Free to start. 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