Source: https://tendernation.io/opportunities/01a13ba3-0074-7069-a63e-1c9b3d8dd622/904-compound-semiconductor-plasma-processing-equipment

closed GB open procedure Suitable for SMEs

# 904 - Compound Semiconductor Plasma Processing Equipment

[Aston University](https://tendernation.io/buyers/aston-university)

Often single bidder

Estimated value

£1,200,000

Published

28 Nov 2023

Deadline

Closed

12 Jan 2024

## Who can bid

- Buyer says suitable for SMEs

    The buyer ticked “suitable for SMEs” on the notice. Anyone can still bid.
- Buyer says suitable for VCSEs

    The buyer ticked “suitable for voluntary, community and social enterprises” on the notice.
- Open procedure

    Anyone can submit a full tender; there is no shortlisting stage.

[More contracts for small businesses and VCSEs](https://tendernation.io/opportunities/for-small-businesses)

## About this tender

The College of Engineering and Physical Sciences (EPS) at Aston university is creating a III-V semiconductor fabrication facility. As a consequence, we are seeking a single supplier to provide a suite of plasma processing tools for:

â&#128;¢ ICP Etch of semiconductor materials (e.g. GaAs, GaN, InP, GaSb)

â&#128;¢ RIE Etch of dielectric materials (e.g. SiO2, SiNx) and metals (e.g. Au, Ge, Cr, Ti, Pt, Pd)

â&#128;¢ Deposition of dielectric layers (e.g. SiO2, SiNx)

The full project specific requirements and equipment specification can be found within the project question set on Aston University's e-tendering portal ProContract under Section 11 - Project Specific Requirements.

## CPV classification

Laboratory, optical and precision equipments (excl. glasses)

Source

Contracts Finder (UK)

[View official notice](https://www.contractsfinder.service.gov.uk/notice/5591d796-f4b0-448b-bf31-74bb59c2bb93)

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[Buyer profile Aston University: past awards and live tenders](https://tendernation.io/buyers/aston-university) [Sector More Laboratory & precision equipment tenders](https://tendernation.io/sectors/laboratory-precision-equipment)

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