Source: https://tendernation.io/opportunities/01a13b98-3710-73f9-9b36-ca368af52fb5/202122547-supply-of-up-to-four-dry-etch-and-deposition-systems

closed GB restricted procedure

# 202122/547 Supply of up to four dry etch and deposition systems

[University of Leeds](https://tendernation.io/buyers/university-of-leeds)

Estimated value

£25,000,000

Published

15 Feb 2022

Deadline

Closed

16 Mar 2022

## About this tender

The University of Leeds is seeking tenders for four dry etch and deposition systems, specifically:

•A Deep-Silicon Reactive Ion Etcher (D-RIE)

•An Inductively Coupled Plasma-RIE (ICP-RIE)

•A parallel plate RIE

•A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD)

## CPV classification

Dry-etching equipment

Source

Contracts Finder (UK)

[View official notice](https://www.contractsfinder.service.gov.uk/notice/9ec2cb51-018e-4038-bfb0-6ad434a92fce)

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