Source: https://tendernation.io/opportunities/01a13b92-8cbb-72c7-8f61-ffeeea630a0f/provision-of-a-300mm-capable-high-throughput-electron-beam-lithography-system

awarded GB open procedure

# Provision of a 300mm Capable High Throughput Electron Beam Lithography System

[University of Southampton](https://tendernation.io/buyers/university-of-southampton)

Estimated value

£7,000,000

Published

12 Dec 2022

Deadline

Closed

18 Jul 2022

## Who can bid

- Open procedure

    Anyone can submit a full tender; there is no shortlisting stage.

## About this tender

The University is looking to procure a new 300mm capable high throughput Electron Beam Lithography (EBL) Write Tool for the Southampton Nanofabrication Centre, to be used by researchers, students, and the wider UK academic community to provide state-of-the-art nanometer scale lithography service.

## CPV classification

Laboratory, optical and precision equipments (excl. glasses)

Source

Find a Tender (UK) · Notice ocds-h6vhtk-0347a3-2022-12-12T08:18:29Z

[View official notice](https://www.find-tender.service.gov.uk/Notice/ocds-h6vhtk-0347a3-2022-12-12T08:18:29Z)

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