Source: https://tendernation.io/opportunities/01a13b91-eb10-7388-a062-7c28f41beece/supply-of-one-off-reactive-ion-etcher-rie-andor-a-one-off-inductively-coupled

closed GB open procedure

# Supply of one off Reactive Ion Etcher (RIE) and/or a one off Inductively Coupled Plasma Reactive Ion Etcher (ICPRIE) in two lots.

[University of Sheffield](https://tendernation.io/buyers/university-of-sheffield)

Estimated value

£300,000

Published

27 May 2022

Deadline

Closed

28 Jun 2022

## Who can bid

- Open procedure

    Anyone can submit a full tender; there is no shortlisting stage.

## About this tender

The Device Fabrication Small Research Facility (SRF) currently has one reactive ion etcher (RIE) and two inductively coupled plasma reactive ion etchers (ICPRIE), serving a wide range of research and industrial customers from across the University and nationally. The SRF is capable of manufacturing semiconductor devices via a range of standard processes, working alongside our Epitaxy facility growing advanced semiconductor materials. Our research portfolio in these areas is in excess of £50million.

Quotations are required for 1 off of each RIE and ICP, in two separate lots, with the specifications detailed within the tender document. As present the likelihood is that only one item will be purchased, hence the title of this exercise being on an and/or basis.

## CPV classification

Laboratory, optical and precision equipments (excl. glasses) Industrial machinery

Source

Find a Tender (UK) · Notice ocds-h6vhtk-0340c3-2022-05-27T12:14:34+01:00

[View official notice](https://www.find-tender.service.gov.uk/Notice/ocds-h6vhtk-0340c3-2022-05-27T12:14:34+01:00)

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