Source: https://tendernation.io/opportunities/01a13b82-3565-7235-9716-ae474a7ba08a/supply-of-a-plasma-etch-tool-for-silicon-carbide-sic-etching

awarded GB open procedure

# Supply of a Plasma Etch Tool for Silicon Carbide (SiC) Etching

[Swansea University](https://tendernation.io/buyers/swansea-university)

Estimated value

£1,000,000

Published

21 Jun 2021

Deadline

Closed

18 Mar 2021

## Who can bid

- Open procedure

    Anyone can submit a full tender; there is no shortlisting stage.

## About this tender

This Tender Specification is for the supply and delivery of a Plasma Etch Tool for SiC etching. In procuring this system, the University is seeking to augment its well-established existing plasma etch and deposition tool set, expanding the capabilities that the CISM will be able to provide.

The new tool will be of strategic importance in delivering both frontside SiC etch capability for power MOSFET trench applications, and backside SiC via etch capability for GaN-on-SiC device applications. Reliability of the equipment is therefore paramount to maintaining, supporting and complimenting the wide array of experimental work that will be conducted within the facility.

## CPV classification

Laboratory, optical and precision equipments (excl. glasses) Miscellaneous evaluation or testing instruments Research, testing and scientific technical simulator Laboratory furniture

Source

Find a Tender (UK) · Notice ocds-h6vhtk-029388-2021-06-21T15:15:02+01:00

[View official notice](https://www.find-tender.service.gov.uk/Notice/ocds-h6vhtk-029388-2021-06-21T15:15:02+01:00)

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